The group's principal activities are to develop and manufacture light-based manufacturing systems and specialty semiconductors. The group operates in the three divisions: research, systems and microelectronics. The research division acts as an innovator of laser and laser-produced plasma technologies for the group's cpl source, euv generators and related products such as high-brightness lasers. Systems division encompasses the development of X-ray lithography steppers and the product engineering, production and integration of cpl light sources and complete cpl stepper systems. The microelectronics division provides process integration and maintenance support for the defense microelectronics activity semiconductor fabrication facility.
