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Dr. Horsky is co-founder of SemEquip and the inventor of the SemEquip ClusterIon® Source. Prior to co-founding SemEquip, he served as Director of Systems Engineering for Brooks Automation, a leading supplier of cluster tools and wafer handling automation for the semiconductor industry. He has held a variety of research positions, including Chief Scientist for Eaton Corporation Semiconductor Equipment Operations, a major manufacturer of ion implanters, where he headed ion source development and was responsible for commercializing the Extended Life Source, Eaton’s flagship ion source. Prior to joining Eaton, he served as Marketing Product Manager for Balzers, a manufacturer of vacuum process tools and analytical instrumentation. Dr. Horsky has received eighteen patents on ion source and related technologies, and has over fifty publications. He received a B.S. in physics from the University of Texas in 1983, and a Ph.D. in experimental solid-state physics from Brandeis University in 1988. | 